ＭＥＭＳガスセンサー、及びそのアレイ、製造方法

Japanese Patent JP7443618

B2

A MEMS gas sensor (A), an array thereof, and a preparation method therefor. The MEMS gas sensor (A) comprises a first substrate (A2) provided with a first cavity (A1), and N gas detection assemblies (A3) provided at an opening of the first cavity (A1), wherein each gas detection assembly (A3) comprises: a supporting arm (A31) and a gas detection part (A32) provided on the supporting arm (A31); the gas detection part (A32) comprises a strip-shaped heating electrode part (A321), an insulating layer (A322), a strip-shaped detection electrode part (A323), and a gas-sensitive material part (A324) that are stacked in sequence; the strip-shaped detection electrode part (A323) comprises a first detection electrode part (A323-1) and a second detection electrode part (A323-2) with a first opening (A325) provided therebetween; the gas-sensitive material part (A324) is provided at the first opening (A325); a first end of the gas-sensitive material part (A324) is connected to the first detection electrode part (A323-1), and a second end of the gas-sensitive material part (A324) is connected to the second detection electrode part (A323-2); and the strip-shaped heating electrode parts (A321) in each gas detection assembly (A3) are connected in sequence to form a heater (A8).

Shoe, ray
Xie, Dongchen
Chen, Dong Liang

JP2023500116A

March 05, 2024

July 10, 2020

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Wiener Company Limited

G01N27/12

JP2014153135A
JP2017090188A
JP2015200644A
JP2004037180A

KR1020050097421A
US20150285772

Patent Attorney Corporation Hiraki International Patent Office

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