Title:
ＭＥＭＳミラー駆動回路
Document Type and Number:
Japanese Patent JP6834201
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an MEMS mirror driving circuit which can control the mirror surface to be inclined at an inclination angle if an inter-electrode potential difference of 0 V is allocated to the inclination angle.SOLUTION: The MEMS mirror driving circuit is a circuit which drives the MEMS mirror having an electrostatic actuator which inclines a mirror surface, and includes: a drive voltage generation circuit for applying a positive drive voltage for driving the electrostatic actuator to one electrode of the electrostatic actuator; and a voltage generation circuit for applying a positive constant voltage larger than an off-set in the drive voltage to the other electrode of the electrostatic actuator.SELECTED DRAWING: Figure 2
Inventors:
Ryoichi Kobayashi
Shintaro Mouri
Shintaro Mouri
Application Number:
JP2016134386A
Publication Date:
February 24, 2021
Filing Date:
July 06, 2016
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
G02B26/08; B81B7/02
Domestic Patent References:
| JP2003140063A | ||||
| JP2007101675A | ||||
| JP2009237117A | ||||
| JP2008046455A | ||||
| JP2013099843A |
Foreign References:
| US20040179257 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
High Kunio Ki
Shotaro Terasawa
Yoshiki Kuroki
High Kunio Ki
Shotaro Terasawa