Title:
ＭＥＭＳセンサ
Document Type and Number:
Japanese Patent JP6621434
Kind Code:
B2
More Like This:
Inventors:
Noriyuki Sakuma
Yasuo Onose
Yasuo Onose
Application Number:
JP2017050843A
Publication Date:
December 18, 2019
Filing Date:
March 16, 2017
Export Citation:
Assignee:
Hitachi Automotive Systems, Ltd.
International Classes:
G01L9/00; B81B3/00; G01L19/06; H01L29/84
Domestic Patent References:
| JP6109568A | ||||
| JP2008034816A | ||||
| JP2007067398A | ||||
| JP2006138802A | ||||
| JP6201500A | ||||
| JP2016121972A | ||||
| JP11201848A | ||||
| JP2016011889A | ||||
| JP2002250665A | ||||
| JP2000214035A | ||||
| JP1017447U |
Foreign References:
| US5672551 |
Attorney, Agent or Firm:
Tsutsui International Patent Office