Title:
MEMSスイッチ
Document Type and Number:
Japanese Patent JP6551071
Kind Code:
B2
Inventors:
Akiyama Jotaro
Kenji Endo
Mt. Aoyagi
Katsunori Oyamauchi
Kenji Endo
Mt. Aoyagi
Katsunori Oyamauchi
Application Number:
JP2015173149A
Publication Date:
July 31, 2019
Filing Date:
September 02, 2015
Export Citation:
Assignee:
tdk Corporation
International Classes:
H01H57/00; B81B3/00; H01H59/00
Domestic Patent References:
JP2010177143A | ||||
JP2010108836A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Takashi Mikami
Yoshiki Kuroki
Takashi Mikami