Title:
マイクロホン製造に特に応用する、ＭＥＭＳ動的圧力センサー
Document Type and Number:
Japanese Patent JP5825899
Kind Code:
B2
Abstract:
The sensor has a rectangular deformable cavity (20) for receiving variations of pressure of ambient atmosphere, where the cavity is formed in a flat layer or a flat substrate. The deformable cavity comprises a movable or deformable wall (25) in a plane of the layer or the substrate. A transmission unit i.e. perforation, transmits the pressure variations to the cavity. A detection unit i.e. capacitive comb (24), detects displacement or deformation of the wall in a plane of the sensor under the effect of pressure variation of the ambient atmosphere. Independent claims are also included for the following: (1) an acoustic energy recuperation device comprising electric energy storage units (2) a method of producing a micro-electromechanical systems (MEMS) and/or nano-electromechanical systems (NEMS) pressure sensor.
More Like This:
| WO/1996/027123 | PRESSURE SENSORS AND PRESSURE TRANSMITTERS |
| JP6534548 | Sensor module |
Inventors:
Philip Robert
Arnault Walter
Arnault Walter
Application Number:
JP2011159766A
Publication Date:
December 02, 2015
Filing Date:
July 21, 2011
Export Citation:
Assignee:
INSERM(INSTITUT NATIONAL DE LA SANTE ET DE LA RECHERCHE MEDICALE)
International Classes:
G01L9/12; B81B3/00; B81C3/00; G01L9/04; H01L29/84; H04R1/02; H04R19/04; H04R31/00
Domestic Patent References:
| JP11220137A | ||||
| JP3336236B2 | ||||
| JP113158U | ||||
| JP2003508997A | ||||
| JP2008252854A | ||||
| JP5562517B2 | ||||
| JP4293378B2 | ||||
| JP5008638B2 | ||||
| JP2541621B2 |
Foreign References:
| US20070047746 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro