Title:
METHOD FOR MANUFACTURING Te ALLOY TARGETING MATERIAL
Document Type and Number:
Japanese Patent JP2001342559
Kind Code:
A
Abstract:
To provide a method for manufacturing a low melting Te alloy targeting material of high density and low oxygen value in a satisfactory yield.
The method for manufacturing the Te alloy targeting material is characterized by steps of manufacturing the Te alloy powder with a gas atomization method, cold-forming the powder by inserting it in a die set for cold forming, and then sintering the powder compact left in the die set in it.
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Inventors:
YANAGIMOTO MASARU
KIMURA DAISUKE
KIMURA DAISUKE
Application Number:
JP2000163079A
Publication Date:
December 14, 2001
Filing Date:
May 31, 2000
Export Citation:
Assignee:
SANYO SPECIAL STEEL CO LTD
International Classes:
B22F9/08; B22F3/10; B22F5/00; C23C14/34; H01L21/285; (IPC1-7): C23C14/34; B22F3/10; B22F5/00; B22F9/08; H01L21/285
Attorney, Agent or Firm:
Shiina Akira
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