Title:
マッハツェンダ型光変調器
Document Type and Number:
Japanese Patent JP7224368
Kind Code:
B2
Abstract:
It is an object of the present invention to provide a technique for making it possible to reduce the size of a Mach-Zehnder type optical modulator. In a clad layer, provided are a plurality of first and second via holes along an optical waveguide. The Mach-Zehnder type optical modulator includes a first travelling wave electrode connected to a first semiconductor region through the plurality of first via holes, extending along the optical waveguide in a plan view to have a width which is wider and a length and a second travelling wave electrode connected to a second semiconductor region through the plurality of second via holes, extending along the optical waveguide in a plan view to have a width which is wider and a length.
Inventors:
Marika Nakamura
Shusaku Hayashi
Koichi Akiyama
Shusaku Hayashi
Koichi Akiyama
Application Number:
JP2020558740A
Publication Date:
February 17, 2023
Filing Date:
December 06, 2018
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G02F1/025
Domestic Patent References:
| JP2006039569A | ||||
| JP2012063769A | ||||
| JP5413865B1 |
Foreign References:
| US20110243492 | ||||
| US20130209023 | ||||
| WO2017159782A1 |
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita