Title:
工作機械のレベリングマウント調整方法およびそれを用いたワークの研削加工方法
Document Type and Number:
Japanese Patent JP6508109
Kind Code:
B2
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Inventors:
Yoshinobu Nishimura
Application Number:
JP2016080242A
Publication Date:
May 08, 2019
Filing Date:
April 13, 2016
Export Citation:
Assignee:
Sumco inc.
International Classes:
B23Q1/00; B24B7/17; B24B47/26; H01L21/304
Domestic Patent References:
| JP2003340661A | ||||
| JP2014130011A | ||||
| JP6331468A | ||||
| JP2013215853A | ||||
| JP52151446A | ||||
| JP2006284340A |
Foreign References:
| GB1558101A | ||||
| US5016338 | ||||
| WO2004033148A1 |
Attorney, Agent or Firm:
Kenji Sugimura
Keisuke Kawahara
Toshio Fukui
Keisuke Kawahara
Toshio Fukui