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Title:
MACHINING DEVICE
Document Type and Number:
Japanese Patent JP2011143516
Kind Code:
A
Abstract:

To provide a machining device predicting the crack of a wafer before dicing the wafer.

The machining device is provided with a machining means including: a machining tool grinding or polishing a wafer held on a chuck table; a spindle to which the machining tool is attached; a motor driving the spindle; and a power supply means supplying power to the motor. The machining device includes: a load current value detection means connected to the motor and the power supply means in series and detecting a load current value of the motor; a storage means storing a normal load current value normally generated in the machining of a wafer; an abnormality detection means detecting the abnormality of a load current value by comparing a load current value detected by the load current value detection means with a normal load current value stored in the storage means; and a recording means recording the abnormality of a load current value detected by the load current value detection means and a load current value detected by the abnormality detection means.


Inventors:
Norimoto, Takashi
Application Number:
JP2010000007202
Publication Date:
July 28, 2011
Filing Date:
January 15, 2010
Export Citation:
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Assignee:
DISCO ABRASIVE SYST LTD
International Classes:
B24B49/16; H01L21/304



 
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