To maintain grinding or polishing for an object to be machined in a favorable condition by removing sludge adhering to the tool or the object to be machined while the machining surface shape of the tool is caused to accurately follow the transferred shape of a machined surface shape of the object to be machined.
In polishing one lens 1, vibration is not applied to a working fluid 17 in the first rocking operation of about ten times of rocking, and in the remaining rocking operation, vibration is applied to the working fluid 17, whereby at the beginning, the machined surface shape of the tool 13 is caused to accurately follow the transferred shape of the machined surface shape of the lens 1, and after that, the machined surface of the tool 13 is stabilized in the favorable condition.
| JP2001038594A | 2001-02-13 | |||
| JP2003053647A | 2003-02-26 |
Satoshi Kono
Sadao Muramatsu
Tetsuya Kazama