To obtain a scanning-type ion microscopic image of a machining section without changing the angle of a sample by providing a sample-supporting part for supporting a sample surface at the cross point between an ion beam irradiation axis for machining and an ion beam irradiation axis for observation.
A sample-retaining part has a sample stage 6 for supporting a sample 7 and moving it in horizontal direction, a mirror 19, and a laser position measuring device 20, and the sample 7 is placed on the stage 6. A beam irradiation axis 102 of an ion beam irradiation system 2 for observation is tilted by 60° from a beam irradiation axis 101 of an ion beam irradiation system 1 for machining and the surface of the sample 7 placed on the sample stage 6 is arranged at the cross point between the axes 101 and 102. The angle between the sample surface to be machined and the irradiation axis 101 of the irradiation system 1 for machining is 90°, while the angle between the sample surface to be machined and the irradiation axis 102 of the irradiation system 2 for observation is approximately 30°.
ONISHI TAKESHI
ARIMA YOSHIO
IWAMOTO HIROSHI
