PURPOSE: To shorten the rack exchanging time and improve the substrate supplying precision, concerning a magazine rack supplying/taking-out device for automatically supplying the substrates housed in the magazine rack to the next process.
CONSTITUTION: An elevator part 2 wherein a rack holding part 10 is provided on a circulating-type intermittent elevating part 3 is arranged and rack carry-in conveyer 30 is arranged in the position corresponding to the lowermost stage part on the side part of the elevator part 2, and a rack carry-out conveyer 50 is arranged in the position corresponding to the uppermost stage part, thereby carrying-in and carrying-out of the rack 1 to/from the elevator part 2 can be simultaneously performed, and the rack exchanging time can be greatly shortened.
MORIOKA MANABU
EGASHIRA HIRONOBU
TAMURA SOICHI
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