Title:
磁性MEMSデバイスおよびその形成方法
Document Type and Number:
Japanese Patent JP4566818
Kind Code:
B2
Abstract:
A microelectromechanical system (MEMS) sensor and method for measuring the motion of an intermediate member and a method for making the MEMS sensor. The MEMS sensor includes a substrate, a lower magnetic member disposed on the substrate, a layer disposed over the substrate, an upper magnetic member disposed at a side of the layer facing the lower magnetic member, an intermediate magnetic member magnetically levitated between the lower magnetic member and upper magnetic member; and a component measuring at least one of motion, forces acting on, and a displacement of the intermediate magnetic member.
Inventors:
Former Zhonghua
Cui Hyun
Cui Hyun
Application Number:
JP2005138298A
Publication Date:
October 20, 2010
Filing Date:
May 11, 2005
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO.,LTD.
International Classes:
G01C19/42; G01P3/44; B81B3/00; B81B5/00; B81B7/02; F16C39/06; G01B7/00; G01B7/30; G01C5/00; G01C19/06; G01C19/16; G01C19/56; G01D5/245; G01D11/02; G01L1/12; G01P3/486; G01P3/488; G01P15/08; G01P15/125; G01V7/00; H02N15/00
Domestic Patent References:
| JP2004507921A | ||||
| JP2004510927A | ||||
| JP2001176369A |
Foreign References:
| US5396136 | ||||
| US5353656 | ||||
| WO2002029268A1 | ||||
| US6534887 | ||||
| EP1322869A1 |
Attorney, Agent or Firm:
Yukio Ono
Tomoko Inazumi
Tomoko Inazumi