Title:
MAGNETIC ANNEALING DEVICE
Document Type and Number:
Japanese Patent JP2014181880
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a magnetic annealing device capable of reducing adhesion of impurities to a semiconductor wafer.SOLUTION: This invention relates to a magnetic annealing device for magnetically annealing an object to be processed under application of a lateral type superconducting magnet acting as magnetic field generating means. The magnetic annealing device comprises a processed body holding element capable of holding the processed body, a processed body transferring mechanism for transferring the processed body between a storing container for storing the processed body and the processed body holding element, a replacing mechanism for replacing the processed body held by the processed body holding element into the magnetic field generating means, cleaning gas feeding means for feeding the cleaning gas, and discharging means for discharging the cleaning gas. An orientation of flow of the cleaning gas formed by the cleaning gas feeding means and the discharging means is in parallel with a main surface of the processed body held by the processed body holding element.
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Inventors:
ONO YUJI
ISHII TORU
SAITO MAKOTO
OBARA YOSHITSURU
TAKEUCHI YASUSHI
ISHII TORU
SAITO MAKOTO
OBARA YOSHITSURU
TAKEUCHI YASUSHI
Application Number:
JP2013058327A
Publication Date:
September 29, 2014
Filing Date:
March 21, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
F27B17/00; H01F6/00; H01L21/8246; H01L27/105; H01L43/12
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito