Title:
MAGNETIC ANNEALING DEVICE
Document Type and Number:
Japanese Patent JP2016054213
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a magnetic annealing device capable of performing magnetic annealing of a large number of substrates, while maintaining thermal uniformity.SOLUTION: A magnetic annealing device for annealing a plurality of substrates in a magnetic field has a horizontal cylindrical processing container performing magnetic annealing while housing the plurality of substrates, heating means provided to cover a surface of the processing container, extending in the longitudinal direction, at least partially from the outside, a magnet provided to cover the heating means farther from the outside, a substrate holding tool capable of holding the plurality of substrates in the processing container, and a heat shield plate provided to surround the substrate holding tool at least partially.SELECTED DRAWING: Figure 2
Inventors:
YAMAZAKI MITSURU
CLARK BARRIE
IAN COLGAN
GEORGE EYRES
IOAN DOMSA
CLARK BARRIE
IAN COLGAN
GEORGE EYRES
IOAN DOMSA
Application Number:
JP2014179343A
Publication Date:
April 14, 2016
Filing Date:
September 03, 2014
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L43/12; F27B5/14
Domestic Patent References:
| JP2004263206A | 2004-09-24 | |||
| JP2004211167A | 2004-07-29 | |||
| JPS6347923A | 1988-02-29 | |||
| JPS6092826U | 1985-06-25 | |||
| JPS6180818A | 1986-04-24 | |||
| JP2003023191A | 2003-01-24 | |||
| JPS50106569A | 1975-08-22 | |||
| JP2014052165A | 2014-03-20 | |||
| JP2008187067A | 2008-08-14 | |||
| JPH10321540A | 1998-12-04 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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