PURPOSE: To provide a magnetic bearing control device for rotating a rotary shaft around a central axis of geometrical shape by controlling the magnetic force of magnetic bearing which supports a rotary shaft with a simple and inexpensive constitution in a non-contact manner by electromagnetic force.
CONSTITUTION: Displacement of a rotary shaft 1 is detected by a displacement sensor 3, and the displacement detection signal is fed to a reduction unit 5 to which a reference signal is inputted, through a low pass fitter 4 of which cut-off frequency is set to 1.5 times of the secondary oscillation point of shaft- bearing system rigid body mode. The displacement deviation signal output from the reduction unit 5 is fed to a current supply controller 6 to thereby control the energization current of an electromagnet 2A which corrects the displacement of the rotary shaft 1. As a result, the rotary shaft of a rotating apparatus which rotates having no frequency component except the frequency component being in synchronous with the number of rotations of the rotary shaft due to dynamic unbalance of the rotary shaft of a turbo molecular pump, high speed centrifugal separater or the like is rotation controlled around a central axis of geometrical shape, and thereby sufficient location control can be carried out.
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TAKIZAWA TAKESHI