To provide a magnetic bearing device for excimer laser equipment wherein an adjustment part of a position displacement detecting sensor is mounted on a magnetic bearing mechanism main body of a gas stirring fan in excimer laser equipment, and individual irregularity of the magnetic bearing mechanism main body is eliminated in design plan by using the adjustment part.
This magnetic bearing device for excimer laser equipment levitates and retains magnetically both ends of a rotary shaft 13 of the stirring fan 12 which is disposed in a laser vessel 11 for sealing laser gas and makes a high speed laser gas flow. The magnetic bearing device is provided with the magnetic bearing mechanism main body 17 having an electromagnet which is arranged facing the rotary shaft 13 of the stirring fan 12 and levitates and retains magnetically the rotary shaft 13, and the position displacement detecting sensor for detecting position of the rotary shaft; a signal processing circuit part 18 for processing output signals of the position displacement detecting sensor; and an exciting power control part 22 which controls exciting power of the electromagnet by using an output of the signal processing circuit part 18. A part or the whole of the signal processing circuit part 18 is mounted on the magnetic bearing mechanism main body part 17, to which signal processing adjustment function is imparted for adjusting sensor detecting sensitivity in such a manner that individual difference is not generated.
SEKIGUCHI SHINICHI
SHINOZAKI HIROYUKI
IBARADA TOSHIMITSU
NAKAZAWA TOSHIHARU
EBARA DENSAN LTD