To provide a magnetic bearing device capable of reducing eddy current by a magnetic field of an induction type displacement sensor and being stably operated, and to provide an excimer laser device comprising the magnetic bearing.
In this magnetic bearing device 9 comprising an electromagnet 9 for supporting a rotating shaft 4 by magnetic force, and the displacement sensor 9a for detecting the displacement of the rotating shaft 4, the displacement sensor 9a is mounted to detect the displacement of the rotating shaft 4 through a protective partition 44a made out of a metallic material, and a thin part 40a of the protective partition 44a is formed at the circumference of an installation part of the displacement sensor 9a of the protective partition 44a. An excimer laser device 20 comprising a laser container 1 for sealing a laser gas, a pair of main discharge electrodes mounted in the laser container 1, a circulation fan for circulating the laser gas and the magnetic bearing for supporting a rotating shaft of the circulation fan, further comprises the magnetic bearing mentioned above.
SEKIGUCHI SHINICHI
IBARADA TOSHIMITSU
EBARA DENSAN LTD
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori