To provide a magnetic bearing device and a turbo molecular pump mounted with the magnetic bearing device capable of reducing the vibration by precluding deterioration in the controllability of a rotor shaft resulting from dispersion in the axially directed position of the rotor shaft and performing a position control of the rotor shaft with the optimum magnetic force in the specified installation attitude.
The sensor sensitivity for adjustment of the sensitivity is stored in a sensitivity storing part 281. The sensitivity storing part 281 emits the stored sensitivity to a sensitivity changeover part 283, which makes changing-over according to the given output and emits the appropriate signal to a sensor signal amplification part 252. The amplification part 252 makes adjustment of the sensor sensitivity according to the sensitivity value stored in the sensitivity storing part 281 in conformity to the given sensor signal, and a sensor output signal 153 having the sensor output voltage V after adjustment is emitted to an A/D converter 154.
NAMIKI HIROYOSHI
FUKAMI HIDEO
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