MAGNETIC FIELD SENSOR AND MAGNETIC FIELD SENSING SYSTEM

Japanese Patent JP3523834

B2

PROBLEM TO BE SOLVED: To provide a magnetic field sensor whose sensitivity is high in the high-frequency region, indluding GHz band.
SOLUTION: The magnetic field sensor is a magnetic field sensor, which is composed of a thin-film magnetic impedance effect element using a magnetic thin film from among magnetic impedance elements as magnetic field sensors, using a magnetic impedance effect. Especially regarding the size shape of the element for the magnetic field sensor, when a current frequency to be energized is 1 GHz or higher, the size (width) of a magnetism-sensitive part magnetic material in a direction nearly perpendicular to a magnetic field sensing direction is formed be small (e.g. 1 μm) and slender with reference to a magnetic field, in such a way that the change in an impedance reflecting a change in the magnetization of the magnetism-sensitive part magnetic material (a soft magnetic material or the like) is generated or that the most noticeable magnetic field of the magnetic resonance of the magnetism-sensitive part magnetic material is lowered. Thereby, the high sensitivity of a magnetism-sensitive part can be realized, as compared with the conventional element (width of 100 μm), as shown in the graph.

WO/1990/004150	ELECTRONIC DIGITAL COMPASS
JP3638125	MAGNETIC DETECTING CIRCUIT
JP7203400	Manufacturing method of GSR element

Tan, Kenji
Yamakawa, Kiyoshi
Honda, Naoki
Ouchi, Kazuhiro
Yamaguchi, Masahiro
Arai, Kenichi
Shimada, Hiroshi

JP2000275313A

April 26, 2004

September 11, 2000

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Akita, Prefecture

G01R33/02; G11B5/33; H01F10/12; H01L43/00; (IPC1-7): G01R33/02; H01L43/00

鈴江 武彦 （外５名）

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