To provide a magnetic head slider with a floating face protective film, which is ultrathin in thickness and also excellent in corrosion resistance and wear resistance.
The method of manufacturing the magnetic head slider comprises: a process of forming a floating face protective film 100 in which an amorphous silicon film 102 and a hard amorphous carbon film 101 are laminated on a slider floating face; a process of removing the surface region of the hard amorphous carbon film 101 by using ion beams tilted in the normal direction of the floating face; and a process of forming a rail on the floating plane on which the floating face protective film 100 is formed. It is required that a diamond component of the hard amorphous carbon film 101 is defined as ≥45% and a desirable range is 60 to 85%. In the process of removing a part of the floating plane protection film 101, when the irradiation angle of the ion beams is ≥60° from the normal line of the floating face of the magnetic head slider and acceleration voltage of the ion beams is ≤300 V, high denseness and covering properties can be obtained.
INABA HIROSHI
SASAKI SHINJI
MIYATA KAZUFUMI
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