Title:
磁気インピーダンス素子
Document Type and Number:
Japanese Patent JP4474835
Kind Code:
B2
Abstract:
To reduce the sensitivity non-uniformity of each magnetic impedance element, and to improve yield at the time of manufacturing the element.
A magnetic impedance element is constituted by forming an organic material thin film 4 whose adhesiveness with a magnetic thin film 3 is satisfactory between a glass substrate 1 and a magnetic thin film 3. A Cr thin film 2 as an inorganic material thin film is formed between the magnetic thin film 3 and the organic material thin film 4, so that the influence of the organic material thin film on the magnetic characteristics of the magnetic thin film can be eliminated. Thus, it is possible to reduce the sensitivity non-uniformity of each magnetic impedance element.
COPYRIGHT: (C)2004,JPO&NCIPI
Inventors:
Takayuki Hirose
Masaharu Edo
Nobuhiro Okuda
Masaharu Edo
Nobuhiro Okuda
Application Number:
JP2003056102A
Publication Date:
June 09, 2010
Filing Date:
March 03, 2003
Export Citation:
Assignee:
Fuji Electric Equipment Control Co., Ltd.
International Classes:
G01R33/02; H01L43/00; G11B5/33
Domestic Patent References:
| JP2000019034A | ||||
| JP2000292506A | ||||
| JP2000292512A | ||||
| JP2002043648A |
Attorney, Agent or Firm:
Iwao Yamaguchi
Kiyoshi Matsuzaki
Kiyoshi Matsuzaki