Title:
MAGNETIC LEVITATION CONTROLLER AND VACUUM PUMP
Document Type and Number:
Japanese Patent JP2019138415
Kind Code:
A
Abstract:
To provide a magnetic levitation controller capable of attaining both operation excellent in coping with disturbance and reduction in influence of spike noise blending.SOLUTION: A control unit 44 for performing magnetic levitation control comprises current control units 417p, 417m that generate a voltage equivalent signal V1 based on a deviation Δ2 of current detection signals Ip, Im with respect to a current setting signal iset, and a voltage equivalent signal V2 based on the current setting signal iset; comprises a selector switch SW2 that selects either the voltage equivalent signal V1 or the voltage equivalent signal V2; and is configured to PWM control an excitation amplifier 43 on the basis of the voltage equivalent signal selected by the selector switch SW2.SELECTED DRAWING: Figure 9
Inventors:
OZAKI JUNICHIRO
Application Number:
JP2018023911A
Publication Date:
August 22, 2019
Filing Date:
February 14, 2018
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F16C32/04; F04D19/04
Domestic Patent References:
| JP2000145773A | 2000-05-26 | |||
| JP2012237285A | 2012-12-06 |
Attorney, Agent or Firm:
Fuyuki Nagai