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Patent Searching and Data


Title:
MAGNETIC LEVITATION TRANSPORT SYSTEM
Document Type and Number:
Japanese Patent JPH07123528
Kind Code:
A
Abstract:

PURPOSE: To provide a magnetic levitation transfer system in which a pallet can be started quickly while facilitating the specification of the pallet position even in a tunnel where the pallet can not be detected visually.

CONSTITUTION: Pairs of a magnetic pole 3 for magnetically levitating a pallet and a displacement sensor 4 are secured at a constant interval along a track 1. The distance between a pallet 2 and the levitation magnetic pole 3 is detected by the displacement sensor 4 and a levitation controller controls the magnetic force acting on the pallet 2 to levitate the pallet 2. The levitation magnetic pole 3 system is switched as the pallet 2 moves thus realizing noncontact supporting of the pallet 2. A detecting means detects the output from the displacement sensor 4 sequentially when levitation of the pallet 2 is started thus detecting the position of the pallet 2.


Inventors:
MORI SATOSHI
Application Number:
JP28577193A
Publication Date:
May 12, 1995
Filing Date:
October 21, 1993
Export Citation:
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Assignee:
EBARA CORP
International Classes:
B65G54/02; B60L13/04; H01L21/677; H01L21/68; (IPC1-7): B60L13/04; B65G54/02; H01L21/68
Attorney, Agent or Firm:
Isamu Watanabe (1 person outside)