To provide a MEMS sensor and the measuring method of the movement of a middle material and to provide a forming method of the MEMS sensor.

The sensor comprises a substrate, a lower magnetic material arranged on the substrate, a layer arranged on an upper part of the substrate, an upper magnetic material arranged at a whole surface of a layer which counters the lower magnetic material part, a middle magnetic material which is magnetically levitated between the lower magnetic material and the upper magnetic material, and a component which measures any of a movement, a displacement and a force applied to the middle magnetic material part.