PURPOSE: To obtain a durable recording medium having a protective layer which is dense and tough and has a small coefft. of friction by providing a plasma-polymerized protective layer consisting of a silicon org. compd. contg. at least Si and O on a magnetic layer while controlling the atomic number ratio of Si and O to a specific range.
CONSTITUTION: A thin ferromagnetic metallic film layer 10 is formed on a base body 1 consisting of a polyeser film or the like and thereafter a mixture composed of the silicon org. compd. such as tetramethyl silane and gaseous O2 is introduced through a gas introducing pipe 6 or the silicon org. compd. contg. Si and O is introduced into a plasma treating vessel 2 while the base body 1 with the thin magnetic film 5 faced on the outside is moved along a cylindrical can 4 from a roll 3 in said vessel toward a take-up roll 5 to form the plasma-polymerized protective layer 11 on the film 10 by an electrode 7. The O atomic number ratio with respect to the Si atomic number of the film 11 is controlled within a 0.7W1.3 times range. The protective layer 11 having 0.7W1.3 times O/Si by the atomic number ratio and N/Si in a 0.3W0.7 times range is provided by using the org. compd. contg. Si, O and N. The magnetic recording medium having the excellent runnability, durability, etc. is thus obtd.
JPH10105945 | MAGNETIC RECORDING MEDIUM |
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OIWA TSUNEMI
KOMI FUMIO
KUBOTA TAKASHI