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Title:
MAGNETIC SENSOR AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2007108011
Kind Code:
A
Abstract:

To provide a magnetic sensor which has a magnetic amplification structure for improving sensitivity, is small, has high sensitivity, and has favorable temperature characteristics and its manufacturing method.

A semiconductor thin film 11 having a magnetosensitive section 11a is provided on a substrate 10. Metallic electrodes 12 are provided on both ends of the magnetosensitive section 11a. A first base layer 14 is provided through a protective layer 13 on the front side in the vicinity of the magnetosensitive section 11a. A first magnetic body 17 having a magnetic amplification function is provided on the first base layer 14. A second base layer 15 is provided on the substrate 10 and on the back of the magnetosensitive section 11a. A second magnetic body 18 having a magnetic amplification function, in conjunction with the first magnetic body 17, is provided on the second base layer 15. A simple manufacturing process performing only magnetic body plating can provide the magnetic amplification structure, thereby achieving the magnetic sensor which is small, has high sensitivity, and has favorable temperature characteristics.


Inventors:
TAKATSUKA TOSHINORI
Application Number:
JP2005299161A
Publication Date:
April 26, 2007
Filing Date:
October 13, 2005
Export Citation:
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Assignee:
ASAHI KASEI DENSHI KK
International Classes:
G01R33/07; G01R33/02; G01R33/09; H01L43/06; H01L43/14
Domestic Patent References:
JPH09129944A1997-05-16
JPS62142862U1987-09-09
JPH11261131A1999-09-24
JPS63299286A1988-12-06
JP2005257433A2005-09-22
JP2005049262A2005-02-24
JP2001176905A2001-06-29
JPH04112587A1992-04-14
Foreign References:
WO2003090289A12003-10-30
Attorney, Agent or Firm:
Yoshikazu Tani