Title:
磁気センサ及びその製造方法並びにそれを用いた電流量検出器
Document Type and Number:
Japanese Patent JP6627774
Kind Code:
B2
Abstract:
A magnetic sensor including: a substrate with a main surface; at least two magnetoresistive effect elements formed on the main surface and connected to a power terminal of a bridge circuit; at least two magnetoresistive effect elements formed on the main surface and connected to a ground terminal of the bridge circuit; a first region in which one of the at least two magnetoresistive effect elements connected to the power terminal and one of the at least two magnetoresistive effect elements connected to the ground terminal are disposed; a second region in which another of the at least two magnetoresistive effect elements connected to the power terminal and another of the at least two magnetoresistive effect elements connected to the ground terminal are disposed; and a bias coil including a first bias application part for applying a bias magnetic field to the first region and a second bias application part for applying a bias magnetic field to the second region. Magnetosensitive directions of the two magnetoresistive effect elements connected to the power terminal are the same, magnetosensitive directions of the two magnetoresistive effect elements connected to the ground terminal are the same, and a difference between a cross-sectional area of the first bias application part and a cross-sectional area of the second bias application part is 35.4% or less.
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Inventors:
Yasunori Takagi
Yasunori Abe
Kawakami Makoto
Yasunori Abe
Kawakami Makoto
Application Number:
JP2016560278A
Publication Date:
January 08, 2020
Filing Date:
November 18, 2015
Export Citation:
Assignee:
Hitachi Metals Co., Ltd.
International Classes:
G01R33/09; G01R15/20; H01L43/08
Domestic Patent References:
| JP2005236134A | ||||
| JP2002107384A | ||||
| JP2007212306A |
Foreign References:
| WO2014148437A1 | ||||
| US20090243607 |
Attorney, Agent or Firm:
Samejima Mutsumi
Norihito Yamao
Norihito Yamao