To provide a magnetic sensor of compact configuration, excellent in detection performance of a magnetic field, and easy to manufacture.
A first and second MR elements are provided, which respectively contain a magnetization fixed layer 63, an intervention layer 62, and a magnetization free layer 61, in order, to represent magnetic variation, being opposite to each other, under signal magnetic field. The magnetization fixed layer 63 of the first and second MR elements has synthetic structure that contains a pinned layer 631, a coupling layer 632, and a pinned layer 633 coupled to the pinned layer 631 by antiferromagnetic manner, in the order starting from the intervention layer 62. Relating to the magnetization fixed layer 63 of the first MR element, the total magnetic moment of the pinned layer 361 is equal to or larger than the total magnetic moment of the pinned layer 633. On the other hand, relating to the magnetization fixed layer 63 of the second MR element, the total magnetic moment of the pinned layer 633 is larger than that of the pinned layer 631.
TERUNUMA KOICHI
MIURA SATOSHI
SAKAI MASANORI
YAMAZAKI HIROSHI
JP2002190630A | 2002-07-05 | |||
JP2006266777A | 2006-10-05 |
Yoichiro Fujishima