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Title:
MAGNETIC SENSOR AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2011027633
Kind Code:
A
Abstract:

To provide a magnetic sensor of compact configuration, excellent in detection performance of a magnetic field, and easy to manufacture.

A first and second MR elements are provided, which respectively contain a magnetization fixed layer 63, an intervention layer 62, and a magnetization free layer 61, in order, to represent magnetic variation, being opposite to each other, under signal magnetic field. The magnetization fixed layer 63 of the first and second MR elements has synthetic structure that contains a pinned layer 631, a coupling layer 632, and a pinned layer 633 coupled to the pinned layer 631 by antiferromagnetic manner, in the order starting from the intervention layer 62. Relating to the magnetization fixed layer 63 of the first MR element, the total magnetic moment of the pinned layer 361 is equal to or larger than the total magnetic moment of the pinned layer 633. On the other hand, relating to the magnetization fixed layer 63 of the second MR element, the total magnetic moment of the pinned layer 633 is larger than that of the pinned layer 631.


Inventors:
OTA NAOKI
TERUNUMA KOICHI
MIURA SATOSHI
SAKAI MASANORI
YAMAZAKI HIROSHI
Application Number:
JP2009175669A
Publication Date:
February 10, 2011
Filing Date:
July 28, 2009
Export Citation:
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Assignee:
TDK CORP
International Classes:
G01R33/09; H01L43/08; H01L43/12
Domestic Patent References:
JP2002190630A2002-07-05
JP2006266777A2006-10-05
Attorney, Agent or Firm:
Yasushi Santanzaki
Yoichiro Fujishima