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Patent Searching and Data


Title:
MAGNETIC SPECTROMETER OF ELEMENTARY PARTICLE
Document Type and Number:
Japanese Patent JPH03187148
Kind Code:
A
Abstract:

PURPOSE: To ensure constant retaining of an air-tight condition by rotating an inner cylinder provided with a beam duct in an outer cylinder, so as to shut off between the inner cylinder and the outer cylinder through an O-ring.

CONSTITUTION: An outer cylinder 22 provided on a part of a dispersion layer main body 21 in a fixed manner, and an inner cylinder 26 provided in the outer cylinder 22 so as to rotate freely, and also, a beam duct 40, which is connected to the inner cylinder 26 through windows 24, 25 formed on the outer cylinder 22, and which supplies an elementary particle beam to the inside of the dispersion layer main body 21, are provided. In addition, O-rings 31, 32 are provided so as to shut off the communication between the inside of the dispersion layer main body and outside air through the gap between the outer cylinder 22 and the inner cylinder 26. When the beam duct 40 is rotated, the inner cylinder 26 is rotated in the fixed outer cylinder 22. The gap between the inner cylinder 26 and the outer cylinder 22 is shut off by the O-rings 31, 32. The air-tightness can thus be retained in the dispersion layer main body 21.


Inventors:
Iwata, Teruo
Application Number:
JP1989000327595
Publication Date:
August 15, 1991
Filing Date:
December 18, 1989
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H01J49/04; H01J49/26; (IPC1-7): H01J49/04; H01J49/26