To provide a magnetic supporting device capable of reducing influence of a control system of the other shaft and having satisfactory control performance even in a transient condition when controlling a position of a supported body supported from the directions of two x and y axes.
Computing devices 13d, 14d obtain a feed forward signal (a compensation value) based on position command signals Sx, Sy from x-axis and y-axis position command means 11a, 11b to compensate feedback control based on position detection signals Px, Py from position sensors 7, 8. For example, since a position controller 13 in the direction of x-axis obtains a feed forward signal based on the position command signals Sx, Sy with respect to two x- and y-axes, influence of the control system of y-axis which is the other axis can be reduced.
MIYAKE HIDETAKA
IMAI YOSHIHITO
Masuo Oiwa
Toshihide Kodama
Takenaka Ikuo