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Patent Searching and Data


Title:
MAGNETIC THIN FILM AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPS63275106
Kind Code:
A
Abstract:

PURPOSE: To obtain a magnetic thin film of the high permeability having a uniform characteristic by laminating a magnetic substance film and a non- magnetic insulator film alternately by sputtering.

CONSTITUTION: The magnetic substances 2 such as permalloy etc., and the non-magnetic insulator films 4 such as alumina etc., are alternately laminated by sputtering so that the sputtering is made in the magnetic field of 40W60 Oe. The magnetic films are laminated so as to form a laminated construction through the non-magnetic insulator films by sputtering system. And when the directions of the internal magnetization between magnetic layers are inverted alternately as shown in the Fig. in forming magnetic films, one axis anisotropy is induced as an overall film. According to the constitution, the magnetic thin film with a high permeability can be obtained.


Inventors:
NAGAO EIICHI
Application Number:
JP10974787A
Publication Date:
November 11, 1988
Filing Date:
May 07, 1987
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
C23C14/34; G11B5/147; H01F10/00; H01F10/08; H01F10/32; H01F41/18; (IPC1-7): C23C14/34; G11B5/147; H01F10/00; H01F41/18
Attorney, Agent or Firm:
Soga Doteru