PURPOSE: To obtain a magnetic thin film of the high permeability having a uniform characteristic by laminating a magnetic substance film and a non- magnetic insulator film alternately by sputtering.
CONSTITUTION: The magnetic substances 2 such as permalloy etc., and the non-magnetic insulator films 4 such as alumina etc., are alternately laminated by sputtering so that the sputtering is made in the magnetic field of 40W60 Oe. The magnetic films are laminated so as to form a laminated construction through the non-magnetic insulator films by sputtering system. And when the directions of the internal magnetization between magnetic layers are inverted alternately as shown in the Fig. in forming magnetic films, one axis anisotropy is induced as an overall film. According to the constitution, the magnetic thin film with a high permeability can be obtained.
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