Title:
MAGNETIC TRANSFER APPARATUS
Document Type and Number:
Japanese Patent JPH04275449
Kind Code:
A
Abstract:
PURPOSE: To markedly improve the production efficiency of a magnetic transfer system.
CONSTITUTION: In a magnetic transfer apparatus 10, a main transfer route 14 which runs a floater 13 with a loaded semiconductor wafer 12 through a vacuum tunnel 11 is provided with a retraction transfer route 16 provided with various processors 15A-15H: the floater 13 running in the X direction stops at a branch, enters the retraction transfer route 16, runs in the Y direction, and is taken up by a processor 15A to undergo processing. This process enables floaters 13 to be transferred into a plurality of processors without stay in the main transfer route 14, thereby markedly improving production efficiency.
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Inventors:
KANEKO AKITAMI
Application Number:
JP3717791A
Publication Date:
October 01, 1992
Filing Date:
March 04, 1991
Export Citation:
Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
B65G47/68; B65G49/00; B65G49/07; B65G54/02; H01L21/677; H01L21/68; (IPC1-7): B65G47/68; B65G49/00; B65G49/07; B65G54/02; H01L21/68
Domestic Patent References:
| JPH01228530A | 1989-09-12 |
Attorney, Agent or Firm:
Tadataka Mitsuishi (1 person outside)