MAGNETICALLY ANNEALING DEVICE

Japanese Patent JP2014183280

A

PROBLEM TO BE SOLVED: To provide a magnetically annealing device that is able to continuously process a large number of wafers.SOLUTION: A magnetically annealing device 100 comprises: an accommodating container conveyance area S1 where an accommodating container 102 for a workpiece W is conveyed; an opening/closing door 12; and a control section. The accommodating container conveyance area S1 has: a first placing table 110 for placing an accommodating container thereon; a second placing table 108 for placing the accommodating container in order to convey the workpiece air-tightly; a storage part 116 for storing the accommodating container; and an accommodating container conveying mechanism 124 for conveying the accommodating container in or out between the first and second placing tables and the storage part. A workpiece conveyance area includes: an aligner 126 for aligning the workpiece; a workpiece holder; a workpiece conveying mechanism 124 for conveying the accommodating container placed on the second placing table and the workpiece; magnetic field generating means 130 having a lateral superconducting magnet for applying a magnetic field to the workpiece; and a transfer mechanism 132 for transferring the workpiece to the magnetic field generating means.

JP2024027859	Transport vehicle
JP5480562	Industrial robot
JPH1145931	VACUUM CHUCK

ONO YUJI
ISHII TORU
SAITO MAKOTO
OBARA YOSHITSURU
TAKEUCHI YASUSHI

JP2013058325A

September 29, 2014

March 21, 2013

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TOKYO ELECTRON LTD

H01L21/677; F27B5/12; F27B5/13; F27B5/14; H01L21/8246; H01L27/105; H01L43/12

JP2004263206A	2004-09-24
JP2002175998A	2002-06-21
JPH07273165A	1995-10-20
JP2003297897A	2003-10-17
JP2012104700A	2012-05-31

Tadashige Ito
Tadahiko Ito

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