Title:
MAGNETICALLY ANNEALING DEVICE
Document Type and Number:
Japanese Patent JP2014183280
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a magnetically annealing device that is able to continuously process a large number of wafers.SOLUTION: A magnetically annealing device 100 comprises: an accommodating container conveyance area S1 where an accommodating container 102 for a workpiece W is conveyed; an opening/closing door 12; and a control section. The accommodating container conveyance area S1 has: a first placing table 110 for placing an accommodating container thereon; a second placing table 108 for placing the accommodating container in order to convey the workpiece air-tightly; a storage part 116 for storing the accommodating container; and an accommodating container conveying mechanism 124 for conveying the accommodating container in or out between the first and second placing tables and the storage part. A workpiece conveyance area includes: an aligner 126 for aligning the workpiece; a workpiece holder; a workpiece conveying mechanism 124 for conveying the accommodating container placed on the second placing table and the workpiece; magnetic field generating means 130 having a lateral superconducting magnet for applying a magnetic field to the workpiece; and a transfer mechanism 132 for transferring the workpiece to the magnetic field generating means.
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Inventors:
ONO YUJI
ISHII TORU
SAITO MAKOTO
OBARA YOSHITSURU
TAKEUCHI YASUSHI
ISHII TORU
SAITO MAKOTO
OBARA YOSHITSURU
TAKEUCHI YASUSHI
Application Number:
JP2013058325A
Publication Date:
September 29, 2014
Filing Date:
March 21, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/677; F27B5/12; F27B5/13; F27B5/14; H01L21/8246; H01L27/105; H01L43/12
Domestic Patent References:
JP2004263206A | 2004-09-24 | |||
JP2002175998A | 2002-06-21 | |||
JPH07273165A | 1995-10-20 | |||
JP2003297897A | 2003-10-17 | |||
JP2012104700A | 2012-05-31 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito