PURPOSE: To aim at enhancing the productivity by providing magnetically floating rails on floors and an elevators, and by arranging a magnetically floatable type carrier vehicle on the rails so that the elevator is moved up and down between the floors.
CONSTITUTION: A vertically movable elevator 3 is disposed in an elevating passage 2 connecting among a plurality of floors of clean rooms 1A through 1C. A magnetically floating rail 5 made of magnetic material 4 is laid in a cargo storage chamber 4 held in a clean condition, which is formed in the elevator 3, and a magnetically floatable carriage vehicle 6 is allowed to travel on the rail being magnetically floated up. Similar magnetically floating guide rails 5a, 5b are laid on the ceilings of the clear rooms on the floors. With this arrangement, the carriage vehicle 6 is moved between the elevator 3 and a certain floor the elevator has reached, through guide rails 5a, 5b. Thereby it is possible to aim at enhancing the efficiency of conveying work.
Uemura, Koji
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