Title:
MAGNETISM DETECTING ELEMENT AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3210933
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a magnetism detecting element whose higher sensitivity can be realized, which can reduce an eddy-current loss, which can improve a magnetic characteristic in a high-frequency band and whose impedance change rate is large.
SOLUTION: In a magnetism detecting element which is provided with a magnetic layer 10 and with a conductor layer 20, the magnetic layer 10 contains a Co-Nb-Zr thin film which is composed of 80 to 87 atomic % of Co, of 10 to 17 atomic % of Nb and of 1 to 6 atomic % of Zr. When the magnetism detecting element is manufactured, a first insulating film 31 is formed on a first magnetic film 11, the conductor layer 20 is formed on the insulating film 31, the conductor film 20 is covered with a second insulating film 32 so as to leave both end parts, and the second insulating film 32 is covered with a second magnetic film 12 so as to constitute a closed magnetic circuit together with the first magnetic film 11.
Inventors:
Akihiro Isomura
Kenichi Arai
Kenichi Arai
Application Number:
JP24486096A
Publication Date:
September 25, 2001
Filing Date:
September 17, 1996
Export Citation:
Assignee:
Tokin Co., Ltd.
Kenichi Arai
Kenichi Arai
International Classes:
G01R33/02; C22C19/07; G11B5/39; H01F10/08; H01F10/12; H01F10/13; H01F10/16; H01F10/32; H01L43/08; H01L43/10; (IPC1-7): G01R33/02
Domestic Patent References:
| JP9270321A | ||||
| JP88473A | ||||
| JP6163257A | ||||
| JP6334237A | ||||
| JP878757A | ||||
| JP8213238A |
Attorney, Agent or Firm:
Yosuke Goto (2 outside)