To prevent oxidation of a magnetic layer adjacent to a spacer layer, and to obtain a large MR change rate.
The magnetoresistance effect element includes first and second magnetic layers L1, L2 having a relative angle of magnetization directions that changes in response to the external magnetic field, and a spacer layer 16 located between the first and second magnetic layers L1, L2. The first magnetic layer L1 is located on the side closer to a substrate on which the magnetoresistance effect element is formed than the second magnetic layer L2. The spacer layer 16 has a main spacer layer 16b containing gallium oxide as a main component, and a bottom layer 16a located between the main spacer layer 16b and the first magnetic layer L1, and containing partially oxidized copper as a main component.
CHO TSUTOMU
TSUCHIYA YOSHIHIRO
MATSUZAWA HIRONOBU
JP2008130809A | 2008-06-05 | |||
JP2009164579A | 2009-07-23 | |||
JP2009060079A | 2009-03-19 | |||
JP2010050297A | 2010-03-04 | |||
JP2008004654A | 2008-01-10 | |||
JP2002319722A | 2002-10-31 | |||
JP2004172615A | 2004-06-17 | |||
JP2008112880A | 2008-05-15 | |||
JP2010044848A | 2010-02-25 | |||
JPH08504303A | 1996-05-07 | |||
JP2003086863A | 2003-03-20 | |||
JP2008130809A | 2008-06-05 | |||
JP2009164579A | 2009-07-23 | |||
JP2009060079A | 2009-03-19 | |||
JP2010050297A | 2010-03-04 | |||
JP2008004654A | 2008-01-10 | |||
JP2002319722A | 2002-10-31 | |||
JP2004172615A | 2004-06-17 |
US6359289B1 | 2002-03-19 |
石橋 政幸
緒方 雅昭