MAGNETORESISTANCE ELEMENT

Japanese Patent JPH02229479

A

PURPOSE:To enable a subtle magnetic field to be detected stably without any bias magnetic field at a resolution of 0.3-0.6mm by specifying a magnetic detecting linear pattern 13 of a ferromagnetic substance formed on a substrate and forming a conductor on the ferromagnetic pattern into stripe patterns inclined with respect to the length of the ferromagnetic pattern. CONSTITUTION:In order to provide a barber-pole-like magnetic detecting pattern, a zigzag linear ferromagnetic pattern 13 of a permalloy is first formed on an insulating layer 2 of silicon dioxide formed on a silicon substrate 1. The ferromagnetic pattern 13 of an iron-nickel alloy has a thickness (t) of 300-500Angstrom and a width W of 90-150mum. Barber-pole-like conductor patterns 5 are formed of gold on the ferromagnetic pattern 13 with an intermediate layer 4 interposed therebetween. The magnetic detecting pattern thus produced can detect intensity of an external magnetic field Hex in the direction of internal magnetization M and in the vertical direction with high sensitivity when current (i) is supplied to the conductor pattern 5. Accordingly, a subtle magnetic field of a geomagnetic level can be detected stably without any bias magnetic field at a resolution of 0.3-0.6mm. Thus, printed patterns with a magnetic ink can be recognized with a higher precision.

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UEDA MASANORI
ENDOU MICHIKO
WAKATSUKI NOBORU

JP5050589A

September 12, 1990

March 02, 1989

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FUJITSU LTD

G01R33/09; G01R33/06; H01L43/08; (IPC1-7): G01R33/06; H01L43/08

JPS6299912A

1987-05-09

Sadaichi Igita

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