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Title:
MAGNETRON VACUUM GAGE AND METHOD OF DISCRIMINATING DEGREE-OF-VACUUM IN LOW VACUUM REGION
Document Type and Number:
Japanese Patent JP2006201054
Kind Code:
A
Abstract:

To solve the problem that a magnetron vacuum gage needs a long time until discharge is performed again when discharge stops once, can not measure in a low vacuum region, has a risk breaking a positive electrode in measurement by constant current, and can not perform measurement as it is since abnormal large current is suppressed to be non-linear even when simply flowing the constant current.

The magnetron vacuum gage gives thermal energy to shorten an adsorption desorption time and shortens a discharge start time by increasing motion energy of electrons, in addition, measures both end voltages, a frequency and amplitude of the magnetron vacuum gage by switching over a plurality of the constant currents to compare measured value data by each constant current so as to display a degree of vacuum.


Inventors:
YAMAGISHI KIKUO
ARAI TORU
Application Number:
JP2005013711A
Publication Date:
August 03, 2006
Filing Date:
January 21, 2005
Export Citation:
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Assignee:
YOSIO ELECTRONIC CO
International Classes:
G01L21/32
Attorney, Agent or Firm:
Akiyoshi Sato