PURPOSE: To save the parts material by forming the spatter ion pump with a cathode support/lead-rod formed with a cold cathode and a conductive stem metal capable of conducting magnetic flux of permanent magnet.

CONSTITUTION: A support/input lead 31 to be connected electrically with upper end hat 22a of cathode is inserted through tubular support/input lead rod 28. Then cold cathode plates 32, 33 made of titanium, magnesium, molybdenum, etc. are pressed in and secured to a power supply path 28a for cathode 21 in said lead rod 28. Furthermore a nonmagnetic tubular stem metal 34 is fixed at the edge of through-hole in lower permanent magnet 24, to form a spatter ion pump comprised of cold cathode plates 32, 33, anode stem metal 34, etc. A ceramic insulation tube 35 is coupled to a tubular stem metal 34 in the spatter ion pump and choked air- tightly below the insulation tube 35.