Title:
MAIN VALVE MECHANISM OF SUBSTRATE TREATMENT DEVICE
Document Type and Number:
Japanese Patent JPH1130352
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To continuously set an opening and closing degree from full opening to full closing by a main valve provided between a high evacuation pump and a treatment chamber. SOLUTION: A main valve element 15 arranged between a treatment chamber 11 and an exhaust pump 14 is opened and closed. It is constituted of a cylinder part 21b to carry out opening and closing motion of the main valve element 15, a lock part 21a to stop the opening and closing motion of the main valve element 15, a positional detection part 22 to detect a cylinder position of the cylinder part 21b, an air valve mechanism 23 to selectively supply air to the cylinder part 21b and the lock part 21a and an air valve controller 24 to control valve motion of the air valve mechanism 23. The air valve mechanism 23 stops the main valve element 15 as the controller changes motion of the air valve mechanism 23 from the cylinder part 21b over to the lock part 21a under a condition where the positional detection part 22 detects an intermediate position in motion to full opening or full closing in case of stopping the main valve element 15 at the intermediate position.
Inventors:
IKEZAKI TARO
ISHIHARA MASAHITO
ISHIHARA MASAHITO
Application Number:
JP20248397A
Publication Date:
February 02, 1999
Filing Date:
July 11, 1997
Export Citation:
Assignee:
ANELVA CORP
International Classes:
F16K24/00; (IPC1-7): F16K24/00
Attorney, Agent or Firm:
Tamiya HiroshiKeisuke