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Title:
MALEIMIDE-BASED MONOMER AND ITS PRODUCTION, ALIPHATIC CYCLIC OLEFIN-BASED MONOMER AND ITS PRODUCTION, COPOLYMER RESIN AND ITS PRODUCTION, PHOTORESIST AND ITS PRODUCTION, AND SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH11228536
Kind Code:
A
Abstract:

To obtain a new monomer facilitating its copolymerization with an aliphatic cyclic olefin, and capable of affording a resin having physical properties withstanding developers and resolving adhesion problem.

This new monomer is shown by the formula [R is a 1-10C (substituted) alkyl, 1-10C (substituted) primary to tertiary alcohol or 1-10C (substituted) diol], pref. 2-maleimido-ethyl acetate, 3-maleimido-propyl acetate or the like. It is recommended that this new monomer is obtained, specifically, by the following steps: (A) maleic anhydride is dissolved in tetrahydrofuran, (B) a reactive substance selected from ethanolamine, aminopropanol and the like is than added to the resulting solution to carry out a reaction, the resulting reaction product is dissolved in acetic anhydride followed by addition of sodium acetate and then carrying out an imidation reaction at 20-120°C for 5-10 h or so, and the resulting reaction product is recrystallized with ethanol or the like.


Inventors:
JUNG JAE CHANG
KO KONKEI
BOK CHEOL KYU
BAIK KI HO
Application Number:
JP29389998A
Publication Date:
August 24, 1999
Filing Date:
October 15, 1998
Export Citation:
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Assignee:
HYUNDAI ELECTRONICS IND
International Classes:
C07C51/347; C07C61/29; C07C69/753; C07D207/448; C07D207/452; C08F222/06; C08F222/40; C08F232/04; C08F232/08; C07D207/36; G03F7/039; C07D207/44; G03F7/004; (IPC1-7): C07D207/448; C07C51/347; C07C61/29; C07C69/753; C07D207/452; C08F222/06; C08F222/40; C08F232/04; C08F232/08; G03F7/039
Attorney, Agent or Firm:
Hiroshi Arafune (1 person outside)