Title:
MANAGEMENT SYSTEM FOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JPH08166994
Kind Code:
A
Abstract:
PURPOSE: To more facilitate data management.
CONSTITUTION: A data file capable of being accessed is distinguished by producing a data directory (.USER) in which plural manufacturing devices 2 to 6 connected to a data editing device through a network are classified into device groups 2, 3 and 4 to 6 capable of being controlled by the same data, and simultaneously, by generating the data directories (.NET) about each manufacturing device 2 to 6. Thus, even in the case where the wrong device is designated as the transferring destination of unusable data, it can not be transferred.
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Inventors:
MORIOKA TOSHINOBU
YOKOTA MUNEYASU
YOKOTA MUNEYASU
Application Number:
JP33297094A
Publication Date:
June 25, 1996
Filing Date:
December 14, 1994
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; B65G61/00; G05B19/418; G06Q50/00; G06Q50/04; H01L21/02; (IPC1-7): G06F17/60; H01L21/02; H01L21/027
Attorney, Agent or Firm:
Kei Tanabe
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