Title:
MANIPULATOR, AND BODY CONNECTING AND SEPARATING METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP2002144298
Kind Code:
A
Abstract:
To provide a manipulator for supporting a sample in a charged particle beam device or the like.
Probes 51A, 51B forming an essential part of the manipulator are respectively composed of a rod part 53 of a constant diameter and a needle part 54, the rod part 53 has a heater 55 on its outer periphery, and a liquid reservoir 56 having a threaded outer face near the needle part 54, and the needle part has a guide groove 57 for guiding the liquid from the liquid reservoir 56 to a point on its outer face.
Inventors:
KONDO KOJIN
Application Number:
JP2000342424A
Publication Date:
May 21, 2002
Filing Date:
November 09, 2000
Export Citation:
Assignee:
JEOL LTD
International Classes:
B25J7/00; B81B7/00; H01J37/20; H01J37/317; (IPC1-7): B81B7/00; H01J37/20