Title:
MANIPULATOR FOR CARRYING AND CHARGING
Document Type and Number:
Japanese Patent JPS62213978
Kind Code:
A
Inventors:
MATSUDA RYUICHI
Application Number:
JP5363886A
Publication Date:
September 19, 1987
Filing Date:
March 13, 1986
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
B25J9/00; B25J9/02; B25J19/00; B65G1/02; B65G1/04; H01L21/67; H01L21/677; H01L21/68; (IPC1-7): B25J9/02; B25J19/00; H01L21/68
Attorney, Agent or Firm:
Shiro Mitsuishi