Title:
MANIPULATOR
Document Type and Number:
Japanese Patent JPS61209893
Kind Code:
A
Inventors:
HAZAKI EIICHI
HONMA KAZUO
HONMA KAZUO
Application Number:
JP4479485A
Publication Date:
September 18, 1986
Filing Date:
March 08, 1985
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/677; B25J17/00; B25J19/00; B25J21/00; H01L21/67; H01L21/68; (IPC1-7): B25J17/00; B25J21/00; H01L21/68
Attorney, Agent or Firm:
Katsuo Ogawa