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Title:
テルル化カドミウム水銀の製造
Document Type and Number:
Japanese Patent JP2007532007
Kind Code:
A
Abstract:
A method of manufacture of cadmium mercury telluride (CMT) is disclosed. The method involves growing one or more buffer layers on a substrate by molecular beam epitaxy (MBE). Subsequently at least one layer of cadmium mercury telluride, Hg1-xCdxTe where x is between 0 and 1 inclusive, is grown by metal organic vapour phase epitaxy (MOVPE). The use of MBE to grow buffer layers allows a range of substrates to be used for CMT growth. The MBE buffer layers provide the correct orientation for later MOVPE growth of CMT and also prevent chemical contamination of the CMT and attack of the substrate during MOVPE. The method also allows for device processing of the CMT layers to be performed with further MOVPE growth of crystalline CMT layers and/or passivation layers. The invention also relates to new devices formed by the method.

Inventors:
Hales, Jeanette Elizabeth
Goose, jean
Cairns, Jiyoung William
Graham, Andryu
Buckle, Louise
Hall, David Jiyoung
Gordon, Nail Thompson
Application Number:
JP2007506831A
Publication Date:
November 08, 2007
Filing Date:
April 05, 2005
Export Citation:
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Assignee:
Kinetic Limited
International Classes:
H01L31/10; C30B23/02; C30B25/02; C30B29/46; C30B29/52; H01L21/365; H01L31/103; H01L31/18; H01L33/12; H01L33/28; H01L33/34; H01L33/44
Domestic Patent References:
JPH0389564A1991-04-15
JPH04145669A1992-05-19
JPS5771190A1982-05-01
JPH05315580A1993-11-26
JPS6077431A1985-05-02
JPH07335929A1995-12-22
JPH08167573A1996-06-25
JPH05226685A1993-09-03
JP2003509868A2003-03-11
Other References:
JPN5007005049; NOUHI A: '"Molecular beam epitaxy and metalorganic chemical vapor deposition growth of epitaxial CdTe on (100)' APPLIED PHYSICS LETTERS V52 N24, 19880613, P2028-2030, AMERICAN INSTITUTE OF PHYSICS.
JPN5007005050; JOHNSON S M: '"Direct Growth of CdZnTe/Si Substrates for Large-Area HgCdTe Infrared Focal Plane Arrays"' JOURNAL OF ELECTRONIC MATERIALS V24 N5, 19950501, P467-473
Attorney, Agent or Firm:
Yoshio Kawaguchi
Makoto Ono
Chihiro Watanabe
Kenkyo Kanayama
Katsuma Osaki
Mitsuaki Tsubokura