Title:
MANUFACTURE OF CAPACITY DEVICE
Document Type and Number:
Japanese Patent JPH05315182
Kind Code:
A
Abstract:
PURPOSE: To obtain a highly reliable capacity device by eliminating cracks appearing on the surface of a ferroelectric thin film by casting light on them.
CONSTITUTION: Cracks 14 appearing on the surface of a (BaxSr1-x)TiO3 film 13 formed on a first TiN film 12-coated supporting substrate 11 can be eliminated by casting laser light 15 on them. Therefore, a capacity device having no crack between the (BaxSr1-x)TiO3 film 13 and a second TiN film 16 can be manufactured.
Inventors:
SHIMADA YASUHIRO
MATSUDA AKIHIRO
KOSUGI NAOTAKA
MIKI TADAAKI
NASU TORU
KIBE MAKI
MATSUDA AKIHIRO
KOSUGI NAOTAKA
MIKI TADAAKI
NASU TORU
KIBE MAKI
Application Number:
JP11713792A
Publication Date:
November 26, 1993
Filing Date:
May 11, 1992
Export Citation:
Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
H01G4/33; H01G4/06; H01G7/06; (IPC1-7): H01G4/06; H01G7/06
Attorney, Agent or Firm:
Akira Kobiji (2 outside)