PURPOSE: To handle a plastics film respective processes similar to a glass substrate by fixing the plastics film to a rigid frame.
CONSTITUTION: The transparent film 2 coated entirely with ITO is collected to prescribed size, and adhered with adhesive fixedly to the frame 1 made of stainless steel to constitute a substrate. Consequently, when photoresist is applied through a roll coater 5, the film 2 is fixed by suction through a porous body 4 formed on a support 3 connecting with a vacuum system, and the film is coated with the resist stably even during the roll coating. When the film substrate is treated in a solution such as an etching tank or a resist removing process, substrates fixed in numbers of frames are stored in a carrier 6 and handled simultaneously, no film 2 flexes to contact the frame 1 or another film 2 and damage, and the whose substrate does not float. The substrates are fixed by suction and handled in the processes of oriented film coating, rubbing orientation, printing of a seal material, etc., to facilitate the handling.
MATSUMOTO HIDEAKI
SAWADA KAZUTOSHI
NAKAYAMA MASAHITO
OPTREX KK