Title:
MANUFACTURE OF CERAMIC DIAPHRAGM STRUCTURE
Document Type and Number:
Japanese Patent JP3492492
Kind Code:
B
Abstract:
PROBLEM TO BE SOLVED: To make small undulation of diaphragm structure after the baking by causing the temperature and contraction rate during the sintering process of a ceramic green base material and ceramic green sheet to satisfy a specific formula and then setting the average sintering temperature difference of the base material expressed by the formula to be larger than 0.
SOLUTION: A ceramic green base material and a ceramic green sheet satisfy the formulae I to III (wherein S (base material) and S (sheet) express respectively the contraction rate (%) of the base material and sheet, while T70 (base material) and T70 (sheet) respectively indicate the temperature (°C) during the sintering process of the base material and sheet) and sets the average sintering temperature difference of the ceramic green base material expressed by the formula IV (where N indicates the number of layers forming the base material and T70 (base material)n indicates the sintering temperature of the nth layer from the lowest layer among the layers forming the base material when the side where the sheet is stacked in the integrated stacked layer substrate is placed in the upper side) to the value larger than 0.
Inventors:
Takeuchi, Yukihisa
Nanataki, Tsutomu
Takeuchi, Katsuyuki
Nanataki, Tsutomu
Takeuchi, Katsuyuki
Application Number:
JP1997000151954
Publication Date:
November 14, 2003
Filing Date:
June 10, 1997
Export Citation:
Assignee:
NGK INSULATORS LTD
International Classes:
G01L9/04; C04B35/64; G01D5/14; G01L9/00; H01L41/09; H01L41/22; G01L9/04; C04B35/64; G01D5/12; G01L9/00; H01L41/09; H01L41/22; (IPC1-7): H01L41/22; H01L41/09
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